Alumina Ceramic Robotic Arm for Precision Wafer Manufacturing
Puwei's advanced Alumina Ceramic Robotic Arm represents the gold standard in semiconductor automation components. Engineered specifically for wafer manufacturing environments, this high-precision robotic arm delivers unmatched performance in cleanroom applications where contamination control, positioning accuracy, and reliability are critical.
Technical Specifications
Material Composition
Base Material: High-Purity Alumina Ceramic (Al₂O₃)
Alumina Content: ≥ 95% (Standard), ≥ 99.6% (High-Purity)
Mohs Hardness: 9 (Excellent scratch and wear resistance)
Density: 3.8-3.9 g/cm³
Surface Finish: Ra ≤ 0.2 μm (Mirror finish available)
Thermal Properties
Thermal Expansion Coefficient: 6-8 × 10⁻⁶/°C
Thermal Conductivity: 15-30 W/(m·K)
Maximum Operating Temperature: 1500°C
Thermal Shock Resistance: Excellent
Electrical & Mechanical Properties
Volume Resistivity: >10¹⁴ Ω·cm
Dielectric Strength: 15-20 kV/mm
Compress…