Boron11 Trifluoride Semiconductor Dopant Semiconductor Dry Etching 

Boron11 Trichloride Semiconductor Dopant Semiconductor Dry Etching Product introduction At normal temperature and pressure, boron trichloride(BCl3) is colorless smoke gas, which is flammable, pungent, acidic odor. Boron trichloride decomposes into hydrochloric acid and boric acid and releases a lot of heat encountering with water, it generates smoke in wet air because of hydrolysis, and BCl3decomposes into hydrochloric acid and boric acid ester in alcohol. Boron trichloride has a strong reaction ability and can form a variety of coordination compounds. Boron trichloride can react with glass and ceramic when heated, and it also reacts with many organic compounds to form a variety of organoboron compounds. High purity boron11 trichloride is mainly used for diffusion doping in the manufacturing process of (silicon) semiconductor devices. Boron impurities are generated through decomposition of BCl3and diffuse toward silicon to form p-type semiconductor a…

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